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PHISIS (PS)

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PHISIS
PHISIS

The Phisis chamber is dedicated to the study of plasma-surface
interaction from the plasma side (the surface analysis is made ex-situ
in the laboratory with TPD, AFM, Raman, MEB...) :
- Differentially pumped quadrupole mass spectrometer for ions (energy)
analysis.
- Langmuir probe.
- Temperature controlled sample manipulator (300 K - 1000 K) with
voltage bias control.
- Load-lock system.