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CAMITER (PS)

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Camiter

The Camiter experimental apparatus is composed of three interconnected
ultra-high vacuum (UHV) chambers.

The first chamber allows the exposure of samples to various
neutral/ionized species and the quantification of adsorbed/implanted
particles in the sample by Temperature Programmed Desorption (TPD) with :
- Two Ion guns
- Hydrogen/Nitrogen atom source based on neutralized micro-wave plasma
- Differentially pumped quadrupole mass spectrometer (QMS)
- Temperature controlled sample manipulator (300 K - 1400 K) with
voltage bias control
- Fast load-lock system for quick exchange of 1cm2 samples

The intermediate chamber contains surface analysis tools :
- Auger Electron Spectrometer

The last chamber is designed to expose small and large samples to a
well-characterized RF plasma and thus is equipped with :
- Langmuir probe
- Laser Induced Fluorescence
- Temperature controlled 4" sample manipulator (300 K - 1100 K) with
voltage bias control
- Load-lock system for 4 inches samples